Improved throughput in 0.6-NA laser reticle writers

Autor:	Gregory E. Valentin, Vishal Garg, Henry Chris Hamaker, Jay P. Daniel, Daniel R. Sprenkel
Rok vydání:	2001
Předmět:	Flexibility (engineering) Engineering business.industry media_common.quotation_subject Volume (computing) Reticle Key (cryptography) Production (economics) Quality (business) Photomask business Throughput (business) Simulation Computer hardware media_common
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.410724
Popis:	New writing strategies have been developed to meet the demand for high-volume mask manufacturing. The ALTA® 3000HT system enables users to meet their performance requirements at increased production capacity. The write time of an ALTA 3000HT mask writer has been observed to be substantially shorter than that of the ALTA 3000 system. The ability to change between eight and four averaging passes, as well as the addition of key hardware improvements, give users increased flexibility in meeting the throughput and print quality requirements for volume production mask manufacturing. Observed throughput and print performance data are presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4e3f3a81a76a6e7df7758d41c7fd9b15 https://doi.org/10.1117/12.410724 Zobrazit plný text záznamu