A miniature, all-electrostatic, field emission electron column for surface analytical microscopy

Autor:	M. Prutton, R. H. Roberts, S J Bean, I. R. Barkshire, M. M. El Gomati, J Kudjoe
Rok vydání:	1997
Předmět:	Beam diameter Materials science business.industry Applied Mathematics Resolution (electron density) Electron Edge (geometry) Field electron emission Optics Electric field Microscopy Atomic physics business Instrumentation Engineering (miscellaneous) Beam (structure)
Zdroj:	Measurement Science and Technology. 8:536-545
ISSN:	1361-6501 0957-0233
Popis:	The design, construction and application of a miniature, electrostatic, two-lens field emission column are presented and demonstrated. The column can provide a finely focused beam of electrons with energies ranging from 100 eV to 15 keV, with corresponding beam currents of 5 - 20 nA, onto a sample at a working distance of 10 mm. Edge resolution measurements show that the beam diameter at the sample is (at worst) at 200 eV falling to 120 nm at 5 keV.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4df4c96b1ce2fcbf28fe21c2855b77f7 https://doi.org/10.1088/0957-0233/8/5/012 Zobrazit plný text záznamu