| Popis: |
The authors recently reported on the development of a 5-level poly-ilicon surface micromachine fabrication process consisting of four levels of mechanical poly plus an electrical interconnect layer. They are now reporting on the first components designed for and fabricated in this process. These are demonstration systems, which definitively show that five levels of polysilicon provide greater performance, reliability, and significantly increased functionality. This new technology makes it possible to realize levels of system complexity that have so far only existed on paper, while simultaneously adding to the robustness of many of the individual subassemblies. |
