| Autor: |
E. Marigo, Mohan Soundara-Pandian, Margo Billen, Philippe Helin, Véronique Rochus, Dries Tabruyn, Hang Gao |
| Rok vydání: |
2021 |
| Předmět: |
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| Zdroj: |
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). |
| Popis: |
This work shows the benefits of using a CMOS compatible 9.5 % Scandium doped Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer array for multi-frequency imaging at 7 and 20 MHz. While the improvement of doping AlN for a single element with 9.5 % Scandium was proven before, we now show its capabilities in array configuration. By using two particular excitation modes of the MEMS array, multi-frequency imaging is enabled and demonstrated. Furthermore, the presented device is fabricated by the Silterra foundry and allows monolithic integration with supporting electronics. This opens the door to a next generation fully integrated solution with increased SNR. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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