Pyramidal Si nanocrystals with a quasiequilibrium shape selectively grown on Si(001) windows in ultrathinSiO2films

Autor: Motoshi Shibata, Yoshiki Nitta, Ken Fujita, Masakazu Ichikawa
Rok vydání: 2000
Předmět:
Zdroj: Physical Review B. 61:7499-7504
ISSN: 1095-3795
0163-1829
Popis: Pyramidal Si nanocrystals selectively grown on Si(001) windows in ultrathin 0.3-nm-thick ${\mathrm{SiO}}_{2}$ films were studied using in situ scanning tunneling microscopy. In the initial growth stage, {1, 1, 13} facets were formed on the four equivalent sidewalls of the crystal due to the repulsion force between neighboring steps. The crystals were stable with a quasiequilibrium shape when they were surrounded by the ${\mathrm{SiO}}_{2}$ film, but rapidly decayed once the boundary to the ${\mathrm{SiO}}_{2}$ film was removed. This indicates that Si adatoms were confined within the Si window area by the surrounding ultrathin ${\mathrm{SiO}}_{2}$ film and the Si adatom density became stationary. The confinement was enabled by a difference in the adsorption energy of Si adatoms on ${\mathrm{SiO}}_{2}$ and these on Si(001).
Databáze: OpenAIRE