Test and debug strategy for TSMC CoWoS™ stacking process based heterogeneous 3D IC: A silicon case study

Autor: Tze-Chiang Huang, Jungi Choi, Vivek Chickermane, Hayden Hyungdong Lee, Min-Jer Wang, Saman M. I. Adham, Sandeep Kumar Goel, Sangdoo Kim, Ashok B. Mehta, Subhasish Mukherjee, Ji-Jan Chen, Brion Keller, Jeongho Cho, Navdeep Sood, Thomas Valind, Frank Lee
Rok vydání: 2013
Předmět:
Zdroj: Handbook of 3D Integration
Popis: Recent advances in semiconductor process technology especially interconnects using Through Silicon Vias (TSVs) enable the heterogeneous system integration where dies are implemented in dedicated, optimized process technologies and stacked in a 3D form. TSMC has developed the CoWoS™ (Chip on Wafer on Substrate) process as a design paradigm to assemble silicon interposer-based 3D ICs. To reach quality requirements for volume production, several test challenges related to 3D ICs need to be addressed. This paper describes the test and debug strategy used in designing a CoWoS™ based stacked IC. The 3D design presented in the paper contains three heterogeneous dies (a logic, a DRAM, and a JEDEC Wide-I/O compliant DRAM) stacked on the top of a passive interposer. For passive interposer testing, a novel test methodology called Pretty-Good-Die (PGD) test is presented, while for inter-die test, a novel scalable multi-tower 3D DFT architecture is presented. Silicon results show that most of the test challenges can be solved efficiently if planned properly; and 3D ICs are reality and not a fiction anymore.
Databáze: OpenAIRE