| Autor: |
R.M. Jones, Sally Asher, C. Marshall, Bhushan Sopori, Robert C. Reedy, D. H. Rose |
| Rok vydání: |
2002 |
| Předmět: |
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| Zdroj: |
Conference Record of the Twenty Third IEEE Photovoltaic Specialists Conference - 1993 (Cat. No.93CH3283-9). |
| DOI: |
10.1109/pvsc.1993.347072 |
| Popis: |
A novel semiconductor device processing technology is described that uses optical energy of a preselected spectrum to produce local melting at an illuminated semiconductor-metal (S-M) interface. This local melting results in an alloyed ohmic contact of very low contact resistivity. This process (called optical processing) takes place in a "cold wall" furnace, and is very insensitive to impurity contamination. The authors describe the application of optical processing to the formation of low-resistivity contacts on the front and back sides of a silicon solar cell in a one-step process. This process can result in considerable cost savings compared to conventional approaches for fabricating contacts on solar cells. > |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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