Above IC integrated SrTiO3 high K MIM capacitors

Autor:	Emmanuel Defay, Jean-Pierre Blanc, Philippe Delpech, Pascal Ancey, Pierre Garrec, J.-C. Giraudin, Bernard Andre, Marc Aid, Julie Guillan, Emmanuelle Serret, Denis Pellissier, Laurent Ulmer, David Wolozan
Rok vydání:	2006
Předmět:	Coupling Materials science business.industry Electrical engineering Hardware_PERFORMANCEANDRELIABILITY law.invention Capacitor Film capacitor Hardware_GENERAL law Hardware_INTEGRATEDCIRCUITS Bicmos integrated circuits business Realization (systems) High-κ dielectric
Zdroj:	2006 European Solid-State Device Research Conference.
ISSN:	1930-8876
Popis:	This paper describes realization and characterization of SrTiO3 (STO) high K MIM capacitors above BiCMOS integrated circuit (IC). These capacitances are connected to IC and are used as coupling capacitors.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4d9958629a116304d2732c4be5c6fc57 https://doi.org/10.1109/essder.2006.307669 Zobrazit plný text záznamu