Integration issues for pressure sensors

Autor: David J. Monk, Todd F. Miller, Bishnu P. Gogoi, Theresa A. Maudie, Jose Torres
Rok vydání: 1999
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.361220
Popis: This paper looks at the issues related to the integration of pressure sensors with the control circuit necessary to achieve the demands of increased performance measured by such parameters as linearity, resolution, accuracy and temperature sensitivity. In addition, the media in which these devices are used can influence the performance considerably with attendant offsets and drifts. Results of the effects of the media exposure on capacitive pressure sensors are presented. The motivation for integrating the sensor with the control circuit is then discussed with respect to these experimental results.
Databáze: OpenAIRE