Calibration of the registration metrology systems

Autor:	Yulia Korobko, Mahesh Chandramouli
Rok vydání:	2004
Předmět:	Matching (statistics) Engineering Measurement method business.industry Calibration (statistics) Quality assessment Real-time computing ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION Grid law.invention Metrology law Electronic engineering Cartesian coordinate system business Lithography
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.568245
Popis:	Tighter lithography requirements are increasing the challenges for mask registration metrology. Demands on calibration will increase as tool specific calibration need to significantly improve to enable accurate plate quality assessment and adequate matching between multiple writer and metrology system. We present results of calibration study conducted on Leica LMS IPRO 2 and LMS IPRO1. Two different calibration techniques were used to match the tool grid to absolute Cartesian coordinate system. The impact of the two calibration techniques on tool matching is summarized. The results are used to make recommendations on improving calibration methodology.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4d5acb82bda41aabfd1147e0e0778e12 https://doi.org/10.1117/12.568245 Zobrazit plný text záznamu