Measurements of the subpixel sensitivity for a backside-illuminated CCD

Autor: Albert Piterman, Zoran Ninkov
Rok vydání: 2000
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.385467
Popis: This paper presents results from a measurement program designed to investigate the variations in sensitivity of focal plane arrays on a sub-pixel scale. High-resolution measurements have previously been reported for a front- illuminated CCD device. New measurements are now provided on the sensitivity variations with in a single pixel of a backside-illuminated CCD. The measurements were made using a stable broadband light source and two high-precision translation stages. The pixel scans have been performed using 4 different filters (3 broadband and 1 narrowband). The results for each spectral region are presented.19
Databáze: OpenAIRE