Local Self-Heating of Pyrolyzed Polymer Microstructure for Further Carbonization at Higher Temperature on Silicon Chip
| Autor: | K. Naka, Satoshi Konishi, Kanji Okamoto |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
chemistry.chemical_classification
Materials science Physics and Astronomy (miscellaneous) Silicon Carbonization General Engineering General Physics and Astronomy chemistry.chemical_element Polymer Substrate (electronics) Microstructure chemistry Electrical resistance and conductance Chemical engineering Joule heating Pyrolysis |
| Zdroj: | Japanese Journal of Applied Physics. 47:8982-8985 |
| ISSN: | 1347-4065 0021-4922 |
| DOI: | 10.1143/jjap.47.8982 |
| Popis: | In this paper, we present the local self-heating of a pyrolyzed polymer microstructure on a silicon substrate by resistive heating for further carbonization at higher temperature. It becomes difficult to pyrolyze polymers on substrates above 1100 °C because the substrates or other materials are thermally damaged. In order to address this restriction, we propose a multistep pyrolysis. A patterned polymer structure is converted to a conductive pyrolyzed polymer by a furnace process at low temperature. The pyrolyzed polymer structure carbonizes itself by resistive heating as the final process. We have successfully demonstrated the proposed method. The obtained material was characterized by electrical resistance measurement and Raman microspectroscopy. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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