14‐4: Enhanced Low Temperature Polycrystalline Silicon Thin‐Film Transistor Device Structure by Doping at Channel Edge

Autor: Seunghyun Jang, Byoungtaek Son, Myungbo Sim, Kihwan Kim, Yongsoo Lee, Tae Young Choi, Yongsu Lee, Byoung Kwon Choo, Seungin Baek, Yongjo Kim
Rok vydání: 2022
Předmět:
Zdroj: SID Symposium Digest of Technical Papers. 53:151-154
ISSN: 2168-0159
0097-966X
Databáze: OpenAIRE