Measuring the Absorption Coefficients of TiN Thin Films with Different Thickness
| Autor: | Chun Ping Jiang, Yu Xiong Li, Hao Yu Chu, Cheng Yan Gu |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science Mechanical Engineering Analytical chemistry 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Tin thin films Mechanics of Materials 0103 physical sciences General Materials Science 0210 nano-technology Absorption (electromagnetic radiation) |
| Zdroj: | Materials Science Forum. 904:120-124 |
| ISSN: | 1662-9752 |
| DOI: | 10.4028/www.scientific.net/msf.904.120 |
| Popis: | In this work, different thick TiN thin films were prepared by pulsed laser deposition on GaN substrates at 650°C. The crystal structure and morphology are characterized by X-ray Diffraction and Atomic Force Microscopy. We characterized the sample by cathodoluminescence spectroscopy at room temperature and measured the thickness of the film by a cross-sectional scanning electron microscopy. Combining the attenuation of light intensity and the thickness, the absorption coefficient of the samples can be estimated by the Beer-Lambert law. The absorption coefficients of TiN metal thin film obtained here are closed with each other. The optical properties may not change with increasing thickness. |
| Databáze: | OpenAIRE |
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