Change in resistivity of fine metal line by KrF excimer laser annealing
| Autor: | Yasutsugu Usami, Kaname Imokawa, Ryoichi Nohdomi, Kouji Kakizaki, Hakaru Mizoguchi |
|---|---|
| Rok vydání: | 2022 |
| Zdroj: | 2022 IEEE International Interconnect Technology Conference (IITC). |
| DOI: | 10.1109/iitc52079.2022.9881290 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|