Method of improving the accuracy of measurement of a plane angle by interference goniometers

Autor: V. V. Kopytov, V. D. Lizunov
Rok vydání: 1998
Předmět:
Zdroj: Measurement Techniques. 41:417-420
ISSN: 1573-8906
0543-1972
DOI: 10.1007/bf02506614
Popis: A method is proposed for certifying the base of interference goniometers and determining the nonlinearity of their readings. It is shown that the error of certification of the base of the instrument is no greater than 0.06 μm.
Databáze: OpenAIRE