| Autor: |
Yu-Kung Hsiao, C.S. Wang, Shou-Gwo Wuu, Tseng Chien-Hsien, Chin-Kung Chang, Ho-Ching Chien, Dun-Nian Yaung, Jeng-Shyan Lin |
| Rok vydání: |
2003 |
| Předmět: |
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| Zdroj: |
Digest. International Electron Devices Meeting. |
| DOI: |
10.1109/iedm.2002.1175962 |
| Popis: |
A high performance 0.18 /spl mu/m CMOS image sensor technology is reported in this paper. It is modified from a generic logic technology. A 64/spl times/64 3T pixel array of various pixel size from 2.8 /spl mu/m to 4.0 /spl mu/m is used to study the scale down issues. By optimizing the process flow, the image sensors with the pixel size downscaled to 2.8 /spl mu/m demonstrates the high sensitivity, low dark current, low white pixel rate and high dynamic range. Although the crosstalk effect is getting worse for smaller pixel size, the 3 /spl mu/m pixel array demonstrates an excellent color rendition capability. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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