Using a CMOS ASIC technology for the development of an integrated ISFET sensor

Autor:	K. Dzahini, Frédéric Gaffiot, M. Le Helley
Rok vydání:	1991
Předmět:	Signal processing Engineering Cmos asic business.industry Electrical engineering Hardware_PERFORMANCEANDRELIABILITY Whole systems CMOS Application-specific integrated circuit Hardware_INTEGRATEDCIRCUITS Electronic engineering Microelectronics ISFET business Cmos process Hardware_LOGICDESIGN
Zdroj:	Euro ASIC '91.
DOI:	10.1109/euasic.1991.212837
Popis:	To take advantage of microelectronics, attempts have been made to integrate sensors in silicon and furthermore to accommodate the whole system formed of the sensor and its signal processing circuit. The major problem is the compatibility between both processes: elaboration of the sensor and integration of the measurement circuit. In this paper the authors present a method allowing industrial production of integrated ISFET sensor. An ASIC CMOS line is used to integrate the signal processing circuit; then the sensor is fabricated by a specific process that does not alter the function of the circuit. >
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4c2175754ddbcfa28e535f1865aec739 https://doi.org/10.1109/euasic.1991.212837 Zobrazit plný text záznamu