The fairy world of quartz vibrating MEMS

Autor: Raphaël Lévy, R. Taibi, J. Guerard, O. Le Traon, Denis Janiaud, S. Masson, Marc Pernice, O. Ducloux
Rok vydání: 2012
Předmět:
Zdroj: 2012 European Frequency and Time Forum.
DOI: 10.1109/eftf.2012.6502370
Popis: Quartz crystal has been an essential material for time and frequency and radio-frequency applications during the 20th century. Quartz is always an unmatched material at the beginning of the 21st century, and hold 80 % of oscillators & RF market which represent today 17 billions market with a 10 % growth per year. This paper describes other more confidential applications - the vibrating inertial MEMS - where the quartz crystal plays also a major role. Clearly, quartz crystal has still a future in these high added value applications, and for a long time.
Databáze: OpenAIRE