Laser interferometer with a high-resolution optical microscope for measuring small line scales

Autor:	L. F. Khavinson, V. M. Baratov, V. L. Fedorin, L. Yu. Abramova
Rok vydání:	1997
Předmět:	Physics business.industry Applied Mathematics Resolution (electron density) Measure (physics) Laser Line (electrical engineering) law.invention Interferometry Optics Optical microscope law Modulation business Instrumentation
Zdroj:	Measurement Techniques. 40:852-855
ISSN:	1573-8906 0543-1972
Popis:	The optical train of an interferometer to certify small-scale measures in the range 1–200 μm with a high-resolution modulation optical microscope for sighting the lines on the measure is described. The circuit of a interference-fringe recording unit is presented. Some results of line scale measurements are reported.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4c11e63ea1a88d7978755b9ada4f0821 https://doi.org/10.1007/bf02504491 Zobrazit plný text záznamu Full text from SpringerLink