Broadband Antireflective Quartz Glasses with Double-Side Nanocone Forests
Autor: | Yudong Yang, Dapeng Chen, Meng Shi, Kewen Long, Haiyang Mao, Jin Li |
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Rok vydání: | 2020 |
Předmět: |
Materials science
Fabrication Wavelength range business.industry 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences law.invention Anti-reflective coating Feature (computer vision) law Broadband Transmittance Optoelectronics 0210 nano-technology business Quartz |
Zdroj: | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS). |
DOI: | 10.1109/mems46641.2020.9056162 |
Popis: | In this work, nanoforests composed of one dimensional quasi-ordered nanocones are prepared on both sides of a quartz glass using a wafer-level fabrication technique, and the nanocones are randomly distributed with different dimensions, diameters, heights and periods. Such a quartz glass with these double-side nanocone forests(NCFs) shows high antireflection in a broad wavelength range from 250nm to 800nm, and an average transmittance of 97.5% is achieved. The broadband antireflection feature of the NCFs is regarded as a cumulative antireflection of various with different sizes in different bands. Based on this, it is expected such quartz glasses have applications in various micro-optoelectronic devices and micro-optical imaging systems. |
Databáze: | OpenAIRE |
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