| Autor: |
Akio Higo, Shunsuke Inagaki, Yuki Okamoto, Yoshio Mita |
| Rok vydání: |
2019 |
| Předmět: |
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| Zdroj: |
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). |
| Popis: |
This paper presents a self-deformable varifocal MEMS mirror for a focus-tunable MEMS scanner. Piezoelectric actuator was monolithically integrated on a 4 mm-diameter mirror, and its focus changed from −120 mm to +140 mm according to the applied DC voltage. The maximum optical scanning angle of the proposed scanner was 26.2°, which meets the demands of high-resolution laser scanning applications. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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