Improvement in a Surface Motor-Driven Planar Motion Stage

Autor:	Katsutoshi Horie, Satoshi Kiyono, Songyi Dian, Kei Katakura, Wei Gao
Rok vydání:	2006
Předmět:	Surface (mathematics) Physics Planar General Computer Science Control theory Motion (geometry) Stage (hydrology) Electrical and Electronic Engineering Motion system
Zdroj:	Journal of Robotics and Mechatronics. 18:808-815
ISSN:	1883-8049 0915-3942
DOI:	10.20965/jrm.2006.p0808
Popis:	We report a surface motor-driven planar motion stage with an XYθZsurface encoder. The surface motor consists of two pairs of linear motors. Magnetic arrays are installed on the platen and stator windings of linear motors on the stage base. The platen is moved in the X and Y directions by X and Y linear motors. It is rotated around the Z axis by moment generated by the X or Y linear motors. The surface encoder consists of two two-dimensional (2D) angle sensors and an angle grid with 2D sinusoidal surface waves. The angle grid is installed on the platen. Sensors onside make the stage compact. The surface encoder is improved for higher positioning accuracy. Measurement errors of the surface encoder using two detectors – a quadrant PD and 2D PSD – are determined by simulation. The surface motor for increasing stage speed is modified. We conducted experiments comparing the previous prototype stage (Prototype I) and the improved stage (Prototype II).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4b4a8d4fa35c92940cf4d4692a8782fe https://doi.org/10.20965/jrm.2006.p0808 Zobrazit plný text záznamu