TEM studies of RF magnetron-sputtered thin films
| Autor: | R. Watton, Ian M. Reaney, David J. Barber |
|---|---|
| Rok vydání: | 1992 |
| Předmět: |
Materials science
business.industry fungi Analytical chemistry food and beverages Liquid nitrogen Condensed Matter Physics Microstructure Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry Transmission electron microscopy Phase (matter) Cavity magnetron Sapphire Lead scandium tantalate Optoelectronics Electrical and Electronic Engineering Thin film business |
| Zdroj: | Journal of Materials Science: Materials in Electronics. 3:51-63 |
| ISSN: | 1573-482X 0957-4522 |
| DOI: | 10.1007/bf00701095 |
| Popis: | Lead scandium tantalate (PST) thin films sputtered onto sapphire substrates have been studied by using transmission electron microscopy. Samples in transverse section were used to characterize the microstructure of the thin films as a function of distance from the PST-sapphire interface whereas samples in plan section allowed a more detailed, structural investigation of the PST. A liquid nitrogen cold stage was used to induce the paraelectric-ferroelectric phase transitionin situ and to perform heating and cooling experiments on the thin films. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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