Inorganic sensors utilizing MEMS and microelectronic technologies

Autor:	Richard Mlcak, Harry L. Tuller
Rok vydání:	1998
Předmět:	Microelectromechanical systems Oxide semiconductor Materials science business.industry MOSFET Microelectronics General Materials Science Nanotechnology Thin film Dissipation business Chemical sensor Enhanced selectivity
Zdroj:	Current Opinion in Solid State and Materials Science. 3:501-504
ISSN:	1359-0286
DOI:	10.1016/s1359-0286(98)80015-6
Popis:	The most significant recent advances in achieving sensor sensitivity and selectivity has been tied to the integration of thin film sensors with micromachined and/or microelectronic technologies. Arrays of micro-hotplates, microcantilever beams and metal oxide semiconductor devices show great promise as chemical sensor platforms exhibiting enhanced selectivity and markedly reduced power dissipation. Microcantilever beams, presently under development, demonstrate exceptional sensitivity for thermal, optical and magnetic stimuli.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4b1370194247ef48b3628307e4b83d8d https://doi.org/10.1016/s1359-0286(98)80015-6 Zobrazit plný text záznamu Full Text from ScienceDirect