Autor:	Yuichi Utsumi, Shigeaki Yamamoto, Kozo Mochiji, Yoshiaki Ukita
Rok vydání:	2009
Předmět:	chemistry.chemical_compound Materials science chemistry business.industry Etching (microfabrication) X-ray Synchrotron radiation Optoelectronics Tetrafluoroethylene Electrical and Electronic Engineering business Microfabrication
Zdroj:	IEEJ Transactions on Electronics, Information and Systems. 129:244-248
ISSN:	1348-8155 0385-4221
DOI:	10.1541/ieejeiss.129.244
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4b0c96354dc539e025993938a7f4e17b https://doi.org/10.1541/ieejeiss.129.244 Zobrazit plný text záznamu