Enhancement of laser plasma EUV emission by shockwave–plasma interaction
Autor: | Fred Bijkerk, René de Bruijn, Konstantin N Koshelev |
---|---|
Rok vydání: | 2003 |
Předmět: |
Physics
Shock wave Acoustics and Ultrasonics business.industry Extreme ultraviolet lithography chemistry.chemical_element Plasma Condensed Matter Physics Laser Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Pulse (physics) Optics Xenon chemistry law Extreme ultraviolet Plasma diagnostics Atomic physics business circulatory and respiratory physiology |
Zdroj: | Journal of Physics D: Applied Physics. 36:L88-L91 |
ISSN: | 1361-6463 0022-3727 |
DOI: | 10.1088/0022-3727/36/18/l03 |
Popis: | Laser plasmas have been produced using a xenon gas jet as a target and a pre/main pulse heating scheme in which the two laser foci are separated in space. Extreme ultraviolet intensities around 13.5 nm and in the range 5–20 nm have been recorded, and an up to five fold increase in intensity has been measured. The gain in intensity is explained by the interaction of the shock wave produced by the pre-pulse with the xenon in the focus of the main pulse. |
Databáze: | OpenAIRE |
Externí odkaz: |