Thin‐film hermeticity: A quantitative analysis of diamondlike carbon using variable angle spectroscopic ellipsometry

Autor:	Bhola N. De, Samuel A. Alterovitz, John A. Woollam, David C. Ingram, John J. Pouch, S. Orzeszko
Rok vydání:	1988
Předmět:	Surface coating Aqueous solution Materials science Solid-state physics Ellipsometry Surface roughness Analytical chemistry General Physics and Astronomy Chemical vapor deposition Composite material Thin film Amorphous solid
Zdroj:	Journal of Applied Physics. 64:4175-4180
ISSN:	1089-7550 0021-8979
DOI:	10.1063/1.341331
Popis:	The purpose of this paper is twofold. First, we report on the successful application of variable angle spectroscopic ellipsometry to quantitative thin‐film hermeticity evaluation. Secondly, it is shown that under a variety of film preparations and moisture introduction conditions water penetrates only a very thin diamondlike carbon (DLC) top surface‐roughness region. Thus DLC is an excellent candidate for use as protective coatings in adverse chemical and aqueous environments.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4ad45f4faa8da27c31d256b335d7e7c8 https://doi.org/10.1063/1.341331 Zobrazit plný text záznamu