Stoichiometric Control of Unltrathin SrTiO3 Film on Ru Electrode by Two Step ALD Process
| Autor: | Yong suk Tak, Hyunjeong Yang, Geun Kyu Choi, Beomseok Kim, Oh Seong Kwon, Seunghwan Lee, Wan-Don Kim, Kyuho Cho, Cha-Young Yoo, Changjin Kang |
|---|---|
| Rok vydání: | 2011 |
| Zdroj: | ECS Meeting Abstracts. :1382-1382 |
| ISSN: | 2151-2043 |
| DOI: | 10.1149/ma2011-01/22/1382 |
| Popis: | not Available. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|