MODIFICATION OF MIS STRUCTURES WITH THERMAL SiO2 FILMS BY PHOSPHORUS DIFFUSION
| Autor: | Stolyarov Aleksandr Alekseevich, Bondarenko Gennady Germanovich, Andreev Vladimir Viktorovich, Maslovsky Vladimir Mikhailovich, Andreev Dmitriy Vladimirovich |
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| Rok vydání: | 2017 |
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| Zdroj: | High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes. 21:299-307 |
| ISSN: | 1093-3611 |
| Databáze: | OpenAIRE |
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