The sheer-contact MAGRES – a magnetic field sensor with minimal manufacturing complexity
| Autor: | Werner Langheinrich, Frank Umbach, J.W.A. von Kluge, H. Acker |
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| Rok vydání: | 2002 |
| Předmět: |
Microelectromechanical systems
Engineering Offset (computer science) business.industry Magnetometer Metals and Alloys Solid-state Electrical engineering Champ magnetique Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Magnetic field law.invention law Electronic engineering Equivalent circuit Electrical and Electronic Engineering Resistor business Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 100:199-205 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/s0924-4247(02)00095-x |
| Popis: | This paper analyzes a solid state magnetic sensor called the “sheer-contact magnetic field sensitive resistor” (SC-MAGRES). The geometry of this device features no lateral insulation and is determined by the contacts only, thus, it can be manufactured with a minimal number of masking steps. Its applications are in the micro-electro-mechanical-systems (MEMS)-area with low-cost sensor-applications using non-standard processes. An equivalent circuit for use in circuit simulators as well as models of the device resistors and sensitivity are presented and compared to measurements which show a maximum sensitivity of 17 μA/VT. Other measurements show a maximum resolution of 120 nT as well as the offset of the device. A comparison to similar magnetic sensors concludes the analysis, together with an investigation of optimization strategies. |
| Databáze: | OpenAIRE |
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