A New Approach to High-Resolution Lithography Based on Conducting Organic Charge Transfer Salts

Autor:	J. D. Kuptsis, Y. Tomkiewicz, E. M. Engler, V. V. Patel, R. G. Schad, M. Hatzakis
Rok vydání:	1982
Předmět:	Materials science business.industry Optoelectronics High resolution Charge (physics) business Lithography
Zdroj:	ACS Symposium Series ISBN: 9780841207158 Polymer Materials for Electronic Applications
DOI:	10.1021/bk-1982-0184.ch007
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4a4e925c2e791cbc93ec58008e15f114 https://doi.org/10.1021/bk-1982-0184.ch007 Zobrazit plný text záznamu