Peculiarities of pulsed laser deposition of thin InGaAsN films in an active background gas atmosphere

Autor:	Oleg Devitsky
Rok vydání:	2022
Předmět:	Mechanical Engineering Atomic and Molecular Physics and Optics Computer Science Applications Information Systems Electronic Optical and Magnetic Materials
Zdroj:	Scientific and Technical Journal of Information Technologies, Mechanics and Optics. 22:1085-1091
ISSN:	2226-1494
DOI:	10.17586/2226-1494-2022-22-6-1085-1091
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4a47ab8419f12eebf970ac0966f32af1 https://doi.org/10.17586/2226-1494-2022-22-6-1085-1091 Zobrazit plný text záznamu