Internal-field-dependent low-frequency piezoelectric energy harvesting characteristics of in situ processed Nb-doped Pb(Zr,Ti)O3 thin-film cantilevers
Autor: | Chan Su Han, Yong Soo Cho, Dong Heon Kang, Kaihua Liu, Ji Ho Kim |
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Rok vydání: | 2019 |
Předmět: |
Materials science
Cantilever Annealing (metallurgy) Mechanical Engineering Poling Metals and Alloys 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology Lead zirconate titanate 01 natural sciences Piezoelectricity 0104 chemical sciences chemistry.chemical_compound chemistry Mechanics of Materials Electric field Materials Chemistry Thin film Composite material 0210 nano-technology Power density |
Zdroj: | Journal of Alloys and Compounds. 781:898-903 |
ISSN: | 0925-8388 |
DOI: | 10.1016/j.jallcom.2018.12.141 |
Popis: | Piezoelectric thin-film-based cantilevers have been investigated for higher energy-harvesting performance with simplified processing steps. Here, a simple in situ film deposition process of heavily Nb-doped lead zirconate titanate (PZT) films, which does not require annealing and poling, has been demonstrated to verify the possibility of use of the resultant films as energy-harvesters specifically for low frequency vibrating sources. The in situ domain formation of the films during the deposition was demonstrated from the apparent shifts of the capacitance-electric field curves, indicating the presence of internal electric fields. The so-called imprint behavior was found to be directly related to the performance of piezoelectric energy harvesting. As an optimal example, 12 mol% Nb-doped cantilever harvesters that showed the largest imprint behavior exhibited the best values of ∼19.1 GPa figure-of-merit and ∼1436 μWcm−3g−2 power density, which are competitive compared to other reported values. |
Databáze: | OpenAIRE |
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