Two novel MEMS actuator systems for self-aligned integrated 3D optical coherent tomography scanners

Autor: Gregory Pandraud, Nuria Sanchez, E Margallo, Pasqualina M. Sarro, Juan Sancho, Kirill Zinoviev, J. Rubio, Aleksandar Jovic
Rok vydání: 2017
Předmět:
Zdroj: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
DOI: 10.1109/memsys.2017.7863528
Popis: Two novel MEMS actuator systems (a torsional one and a deflecting one) for a new self-aligned integrated 3D optical coherent tomography (OCT) scanner are reported. These new systems, with a footprint of 2.5mm×2.5 mm each, provide a χ and y scanning range of 730 μm (tilting range of 8°) with an average power consumption of 150 mW. As the device integrates a silicon collimating micro lens, an optical waveguide and a MEMS actuator system on a single chip, it provides a considerable decrease in optical losses thanks to the intrinsic alignment obtained during fabrication, while significantly reducing the complexity and time that assembly and packaging of separate components demand, therefore making fully integrated, miniaturized 3D OCT scanners feasible.
Databáze: OpenAIRE