Stress and Microstructure Evolution during the Deposition and Crystallization of DCMagnetron Sputter Deposited Amorphous ITO

Autor:	Courtney Lanier, Hyo-Young Yeom, Eric Chason, David C. Paine
Rok vydání:	2001
Předmět:	Stress (mechanics) Materials science Chemical engineering Sputtering law Partial pressure Crystallization Microstructure Deposition (law) Stoichiometry Amorphous solid law.invention
Zdroj:	MRS Proceedings. 666
ISSN:	1946-4274 0272-9172
Popis:	The deposition of ITO onto glass substrates at room temperature results in a metastable amorphous phase that undergoes crystallization at remarkably low homologous temperatures (T/Tm
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4a25fa46e696fca0d3d03d3b526b60bf https://doi.org/10.1557/proc-666-f2.5 Zobrazit plný text záznamu Full text from SpringerLink