Improvement of the effective work function and transmittance of thick indium tin oxide/ultrathin ruthenium doped indium oxide bilayers as transparent conductive oxide
| Autor: | Ippei Yamamoto, Toshihide Nabatame, Sukkaneste Tungasmita, Kattareeya Taweesup, Makoto Takahashi, Kazutoshi Tsukagoshi, Tomoji Ohishi, Kazuhiro Ito, Gobboon Lothongkum, Toyohiro Chikyow, Patama Visuttipitukul |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
Inorganic chemistry Oxide chemistry.chemical_element 02 engineering and technology Electroluminescence 01 natural sciences chemistry.chemical_compound 0103 physical sciences Materials Chemistry Transmittance Transparent conducting film 010302 applied physics business.industry Doping Metals and Alloys Surfaces and Interfaces 021001 nanoscience & nanotechnology Surfaces Coatings and Films Electronic Optical and Magnetic Materials Indium tin oxide Amorphous solid chemistry Optoelectronics 0210 nano-technology business Indium |
| Zdroj: | Thin Solid Films. 598:126-130 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2015.11.070 |
| Popis: | Ruthenium doped indium oxide (In1 − xRuxOy) films fabricated using DC magnetron co-sputtering with In2O3 and Ru targets were investigated for use as transparent conductive oxides. The In1 − xRuxOy films had an amorphous structure in the wide compositional range of x = 0.3–0.8 and had an extremely smooth surface. The transmittance and resistivity of the In1 − xRuxOy films increased as the Ru content increased. The transmittance of the In0.38Ru0.62Oy film improved to over 80% when the film thickness was less than 5 nm, while the specific resistivity (ρ) was kept to a low value of 1.6 × 10− 4 Ω cm. Based on these experimental data, we demonstrated that thick indium tin oxide (In0.9Sn0.1Oy, ITO) (150 nm)/ultrathin In0.38Ru0.62Oy (3 nm) bilayers have a high effective work function of 5.3 eV, transmittance of 86%, and low ρ of 9.2 × 10− 5 Ω cm. This ITO/In0.38Ru0.62Oy bilayer is a candidate for use as an anode for organic electroluminescent devices. |
| Databáze: | OpenAIRE |
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