Optical Nano-Metrology of Sub-Wavelength Objects Enabled by Artificial Intelligence

Autor:	Guanghui Yuan, Carolina Rendon-Barraza, Giorgio Adamo, Tanchao Pu, Nikolay I. Zheludev, Eng Aik Chan
Rok vydání:	2021
Předmět:	Diffraction Materials science Optics Artificial neural network business.industry Scanning electron microscope Nano business Object (computer science) Nanoscopic scale Ptychography Metrology
Zdroj:	Conference on Lasers and Electro-Optics.
DOI:	10.1364/cleo_at.2021.jw1a.65
Popis:	We experimentally demonstrate that a linear dimension of a sub-wavelength nanoscale object can be measured with an accuracy better that λ/250 by a deep-learning-enabled examination of its diffraction pattern.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::495ff4f57a9341c33abc5aa81425c627 https://doi.org/10.1364/cleo_at.2021.jw1a.65 Zobrazit plný text záznamu