Formation tantalum coating on NiTi surface by magnetron sputtering technique

Autor:	A S Larionov, A S Dikov, E A Zhakanbaev
Rok vydání:	2022
Předmět:	History Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 2155:012005
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/2155/1/012005
Popis:	The materials of research the structure and morphology of the tantalum coating on the surface of the NiTi alloy in this work presents. Tantalum was deposited by the DC - magnetron sputtering method. The influence of the energy supplied to the magnetron on the formation of the Ta-coating is shown.Changes in the structure of the coating at different stages of its formation are shown.It was found that with a significant decrease in the energy supplied to the magnetron, tantalum is deposited more uniformly. Besides the gradient of mechanical stresses in the coating is reduced.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::493fd4805951a2e62aba4dce0a72009f https://doi.org/10.1088/1742-6596/2155/1/012005 Zobrazit plný text záznamu