Measurement of compositional inhomogeneity of liquid phase epitaxial InGaPAs

Autor:	T. J. Roth, Nick Holonyak, P. E. Brunemeier, G. E. Stillman
Rok vydání:	1983
Předmět:	Diffraction Crystallography Materials science Physics and Astronomy (miscellaneous) Solid-state physics X-ray crystallography Analytical chemistry Crystal growth Thin film Absorption (electromagnetic radiation) Epitaxy Chemical composition
Zdroj:	Applied Physics Letters. 43:373-375
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.94342
Popis:	Precision x‐ray measurements have been performed on the compositional inhomogeneity that occurs during the initial part of the liquid phase epitaxial (LPE) growth of InGaPAs on InP substrates from step‐cooled solutions. Double crystal x‐ray diffraction and absorption data are presented on epitaxial layers grown short term (30 ms) and long term (1–2 min). These data are used to determine the difference in alloy composition of the two growth methods. This study indicates that long‐term LPE growth of quaternary alloys is inhomogeneous, while short‐term growth can be made uniform.
Databáze:	OpenAIRE
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