Influence of Substrate Temperature on Structure and Optical Property of Cu3N Thin Films

Autor:	Jian Rong Xiao, Ye Guang Liang, Ai Hua Jiang
Rok vydání:	2010
Předmět:	Diffraction Materials science genetic structures business.industry Band gap General Engineering Analytical chemistry chemistry.chemical_element Crystal structure Substrate (electronics) Nitride Copper eye diseases Carbon film chemistry Optoelectronics sense organs Thin film business
Zdroj:	Advanced Materials Research. :218-221
ISSN:	1662-8985
Popis:	Copper nitride thin films were prepared by reactive radio frequency magnetron sputtering at various substrate temperatures. The surface morphology and crystal structure of the thin films were characterized by atomic force microscope (AFM) and X-ray diffraction (XRD), respectively. The AFM images demonstrate that the films have a compact structure. The XRD test indicates that growth orientation of the thin films prefers the (111) or (100) at different substrate temperature. The optical transmission properties of the thin films were obtained by an ultraviolet visible spectrometer. The optical band gap of the thin films decreases with increasing substrate temperature.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::492778be9a7bfa9f903ccd03571b9ce0 https://doi.org/10.4028/www.scientific.net/amr.152-153.218 Zobrazit plný text záznamu