Direct-write inkjet printing for fabrication of barium strontium titanate-based tunable circuits
| Autor: | J.L. Alleman, Alexander Miedaner, D. S. Ginley, T. Kaydanova, Calvin J. Curtis, John D. Perkins |
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| Rok vydání: | 2007 |
| Předmět: |
Permittivity
Materials science business.industry Metals and Alloys Mineralogy Surfaces and Interfaces Dielectric Electrical contacts Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Capacitor chemistry.chemical_compound chemistry law Materials Chemistry Strontium titanate Dissipation factor Optoelectronics Thin film Contact print business |
| Zdroj: | Thin Solid Films. 515:3820-3824 |
| ISSN: | 0040-6090 |
| Popis: | Tunable capacitors with up to 30% tuning and a loss tangent (tanδ) less than 0.002 at 1 MHz were fabricated from Ba 0.6 Sr 0.4 TiO 3 (BST) films using inkjet-printed liquid metalorganic precursors. BST films of various thicknesses were produced by printing multiple stacks of the individual inkjet-printed layers. The dielectric constant of the printed films increased as a function of thickness. The largest dielectric constant, 1000, and the highest tunability, 30%, were measured on a 420 nm thick film, the thickest film studied in this work. Spray-printed silver contacts were employed and demonstrated good adhesion and good electrical contact to the inkjet-printed BST films. This also demonstrated proof of principle for direct-write printing of metal contacts onto BST films from metalorganic sources. |
| Databáze: | OpenAIRE |
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