ab initio Study of Photochemical Decomposition Mechanism of Triphenylsulfonium Salts for KrF Excimer Laser Exposure

Autor:	Yoshikazu Nakazono, T. Hoshino, Minoru Tsuda, Masayuki Rata, Eiichi Aram, Norihito Ohmori
Rok vydání:	1996
Předmět:	Materials science Polymers and Plastics Excimer laser medicine.medical_treatment Organic Chemistry Materials Chemistry medicine Ab initio Photochemical decomposition Photochemistry Mechanism (sociology)
Zdroj:	Journal of Photopolymer Science and Technology. 9:587-590
ISSN:	1349-6336 0914-9244
DOI:	10.2494/photopolymer.9.587
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::48ed8f4736723f862872aafc0aa3e12a https://doi.org/10.2494/photopolymer.9.587 Zobrazit plný text záznamu