| Autor: |
M. V. Kostenko, I. V. Cheshko, Serhii Ivanovych Protsenko, A. M. Lohvynov |
| Rok vydání: |
2016 |
| Předmět: |
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| Zdroj: |
2016 International Conference on Nanomaterials: Application & Properties (NAP). |
| Popis: |
The paper shows the results of the study structural-phase state and electrical properties of Ru nanocrystalline films. It was found that the film thickness and substrate temperature greatly affects on the crystal structure of these nanostructures. At thickness d 50 nm and heating the substrate upon receipt of 600 K and subsequent annealing to 900 K formed polycrystalline hexagonal structure with an average crystallite size of 15 nm. Lattice parameters close to the table values for bulk samples and ρ = (2−4)·10−6 Ω·m. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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