The Use of High Frequency Thermal Plasma to Synthesise Nanoscale Ceramic Powders

Autor: Luc Segers, Philippe Vernin
Rok vydání: 2001
Předmět:
Zdroj: Key Engineering Materials. :7-10
ISSN: 1662-9795
DOI: 10.4028/www.scientific.net/kem.206-213.7
Popis: This paper describes three laboratory scale installations based on high frequency plasma torches to produce and use nanometric size ceramic powders. Two were used to synthesise Si3N4, SiO2, and SiC from SiCl4 precursor gas and NH3, O2 and CH4 reactive gases. The last one was designed for high frequency plasma spraying.
Databáze: OpenAIRE