Autor:	J. Meichsner
Rok vydání:	2005
Předmět:	Physics chemistry.chemical_classification Plasma surface chemistry Chemical physics Reactive plasma Surface modification Deposition (phase transition) Plasma diagnostics Plasma Polymer Atomic physics Plasma processing
Zdroj:	Plasma Physics ISBN: 3540252746
DOI:	10.1007/11360360_5
Popis:	Characteristic properties and generation mechanisms of low temperature plasmas in different gas discharges are presented. A special part is focussed to the plasma surface transition including electric probes for plasma diagnostics. Reactive plasma surface interaction is exemplarily shown in polymer surface modification and deposition of thin organic films.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::48c8be6c58b1f6336f9724c49f74ef2f https://doi.org/10.1007/11360360_5 Zobrazit plný text záznamu