P-124: Methods of Measuring Thin Film Thickness on Polymer Substrate

Autor: Fu-Shiang Yang, Chih-Jung Chiang
Rok vydání: 2011
Předmět:
Zdroj: SID Symposium Digest of Technical Papers. 42:1570-1572
ISSN: 0097-966X
DOI: 10.1889/1.3621163
Popis: In this paper two methods of measuring the thickness of a thin film layer on polymer substrate are presented. The first one is based on a polarizing microscope and analyzing the interference spectrum of white light reflected by the specimen. The second is a microscope with a high numerical aperture lens. The interference fringes caused by the birefringence of the polymer substrate can be eliminated, and by a numerical procedure the film index and thickness can be extracted from the measured reflection spectrum. As an example, we made measurements on a single layer UV glue thin film coated on a polymer substrate, polyethylene terephthalate (PET) in this case. We used the Fourier Transform method to analyze the spectrum and confirmed the effect of these methods.
Databáze: OpenAIRE