Investigation of dual-frequency effect on the ion energy and flux in Torr-regime plasma by a two-dimensional GPU-PIC simulation
| Autor: | Min Young Hur, Hae June Lee, Yukinori Sakiyama, Chang Ho Kim, Jin Seok Kim |
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| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | Plasma Sources Science and Technology. |
| ISSN: | 1361-6595 0963-0252 |
| DOI: | 10.1088/1361-6595/ac0a4c |
| Databáze: | OpenAIRE |
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