P8.4 - Optimized Electrical Feed Through for a Piezoresistive Silicon High-Pressure Sensing Element up to 500 MPa

Autor:	Wolf-Joachim Hummel, Patrick Heinickel, Roland Werthschützky
Rok vydání:	2011
Předmět:	Materials science Silicon chemistry business.industry High pressure chemistry.chemical_element Structural engineering Composite material business Piezoresistive effect
Zdroj:	Proceedings SENSOR 2011.
DOI:	10.5162/sensor11/sp8.4
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::484902232ae992bc060bd19b511fadc1 https://doi.org/10.5162/sensor11/sp8.4 Zobrazit plný text záznamu