A contribution towards model-based design of application-specific MEMS
| Autor: | Ralf Sommer, Jenny Klaus, Eric Schafer, Astrid Frank, Roman Paris |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Engineering business.industry 010401 analytical chemistry Design flow Control engineering Accelerometer 01 natural sciences 0104 chemical sciences Application-specific integrated circuit Flow (mathematics) Hardware and Architecture 0103 physical sciences Model-based design Electronic engineering Electrical and Electronic Engineering business Engineering design process Software Electronic circuit |
| Zdroj: | Integration. 58:454-462 |
| ISSN: | 0167-9260 |
| Popis: | The design process of heterogeneous systems containing electro-mechanical components and electronic circuits involves expert knowledge, methods, and tools from different engineering domains. Cost-efficient research and development of such heterogeneous systems requires a systematic design flow without gaps. A contribution towards this global goal is presented in this article. A development and synthesis tool for one-dimensional accelerometer MEMS has been implemented, calculating sensor solutions and generating the models and layouts required for a hierarchical design flow in an automatic, module-based approach. Utilizing this flow, different accelerometers have been designed, manufactured, and characterized. A dedicated readout ASIC was developed to validate their dynamic behaviour. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect